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> 设备介绍 > 曝光机

曝光机

  • 卷对卷单面自动曝光机
  • 卷对卷单面自动对位曝光机
  • 卷对卷双面自动曝光机
  • 卷对卷双面自动曝光机(垂直型)
  • 双面顺次自动曝光机(外层用)
  • 双面自动曝光机(内层用)
  • 单面半自动(对位及间隙)曝光机
  • 双面顺次半自动曝光机
  • 手动平行光曝光机

卷对卷单面自动曝光机

ITEM Single Side SPEC. Double Side SPEC.
Exposure Area
(曝光范围)
510×510㎜
Lamp
(灯管)
5㎾ 超高压水银灯管
Wave Length
(光源波长)/th>
365㎚(320~480㎚)
Resolution
(解析度)
L/S = 30/30㎛
Intensity
(絶對照度)
≥ 25 ㎽/㎠
Uniformity
(照度分布)
超过 90%
C/A & D/A C/A ≤ 1.5°, D/A ≤ 1.5°
Lamp Lifetime
(灯管寿命)
≥ 1500Hr
Cooling
(冷却)
Air Cooling
Alignment Accuracy
(对位精度)
≤ ±10㎛
Control
(控制)
PLC & PC
DIM
(W x L x H) ㎜
2,220×2,640×2,240 2,000×6,300×2,600
Operation Condition
(运用设备环境条件)
Clean Room (≤1000 Class)
Power Supply
(电源)
3P 220/380 60/50㎐
15㎾
3P 220/380 60/50㎐
20㎾

卷对卷单面自动对位曝光机

ITEM SPEC.
Exposure Area
(曝光范围)
510×510㎜
Lamp
(灯管)
5㎾ 超高压水银灯管
Wave Length
(光源波长)
365㎚(320~480㎚)
Resolution
(解析度)
L/S = 30/30㎛
绝对糙度
(Intensity)
≥ 25 ㎽/㎠
照度分布
(Uniformity)
超过 90%
C/A & D/A C/A ≤ 1.5°, D/A ≤ 1.5°
Lamp Lifetime
(灯管寿命)
≥ 1500Hr
Cooling
(冷却)
Air Cooling
Alignment Accuracy
(对位精度)
≤ ±10㎛
Control
(控制)
PLC & PC
DIM
(W x L x H) ㎜
2,400×5,000×2,300
Operation Condition
(运用设备环境条件)
Clean Room (≤1000 Class)
Power Supply
(电源)
3P 220/380 60/50㎐ 15㎾

卷对卷双面自动曝光机

ITEM Single Side SPEC. Double Side SPEC.
Exposure Area
(曝光范围)
510×510㎜
Lamp
(灯管)
5㎾ 超高压 Mercury Lamp
Wave Length
(光源波长)
365㎚(320~480㎚)
Resolution
(解析度)
L/S = 30/30㎛
绝对糙度
(Intensity)
≥ 25 ㎽/㎠
照度分布
(Uniformity)
超过 90%
C/A & D/A C/A ≤ 1.5°, D/A ≤ 1.5°
Lamp Lifetime
(灯管寿命)
≥ 1500Hr
Cooling
(冷却)
Air Cooling
Alignment Accuracy
(对位精度)
≤ ±10㎛
Control
(控制)
PLC & PC
DIM
(W x L x H) ㎜
2,220×2,640×2,240 2,000×6,300×2,600
Operation Condition
(运用设备环境条件)
Clean Room (≤1000 Class)
Power Supply
(电源)
3P 220/380 60/50㎐
15㎾
3P 220/380 60/50㎐
20㎾

卷对卷双面自动曝光机(垂直型)

ITEM SPEC.
Exposure Area
(曝光范围)
550×700㎜
Lamp
(灯管)
5㎾ 超高压 Mercury Lamp
Wave Length
(光源波长)
365㎚(320~480㎚)
Resolution
(解析度)
L/S = 10/10㎛
绝对糙度
(Intensity)
≥ 30 ㎽/㎠
照度分布
(Uniformity)
超过 90%
C/A & D/A C/A ≤ 1.5°, D/A ≤ 0.5°
Lamp Lifetime
(灯管寿命)
≥ 1500Hr
Cooling
(冷却)
Air Cooling
Alignment Accuracy
(对位精度)
≤ ±3㎛
Control
(控制)
PLC & PC
DIM
(W x L x H) ㎜
6,714×2,620×2,952
Operation Condition
(运用设备环境条件)
Clean Room (≤1000 Class)
Power Supply
(电源)
3P 220/380 60/50㎐ 25㎾

双面顺次自动曝光机(外层用)

ITEM SPEC.
Exposure Area
(曝光范围)
510×610㎜
Lamp
(灯管)
5㎾ 超高压 Mercury Lamp
Wave Length
(光源波长)
365㎚ (320~480㎚)
Resolution
(解析度)
L/S = 30/30㎛
绝对糙度
(Intensity)
≥ 25 ㎽/㎠
照度分布
(Uniformity)
超过 90%
C/A & D/A C/A ≤ 1.5°, D/A ≤ 1.5°
Lamp Lifetime
(灯管寿命)
≥ 1500Hr
Cooling
(冷却)
Air Cooling
Alignment Accuracy
(对位精度)
≤ ±5㎛ ≤ ±10㎛
DIM
(W x L x H) ㎜
3,200×7,000×2,400 2,500×4,000×2,600
Control
(控制)
PLC & PC
Operation Condition
(运用设备环境条件)
Clean Room (≤1000 Class)
Power Supply
(电源)
3P 220/380V 60/50㎐ 15㎾

双面自动曝光机(内层用)

ITEM SPEC.
Exposure Area
(曝光范围)
510×610㎜
Lamp
(灯管)
5㎾ 超高压 Mercury Lamp
(灯管)
Wave Length
(光源波长)
365㎚ (320~480㎚)
Resolution
(解析度)
L/S = 30/30㎛
绝对糙度
(Intensity)
≥ 25 ㎽/㎠
照度分布
(Uniformity)
超过 90%
C/A & D/A C/A ≤ 1.5°, D/A ≤ 1.5°
Lamp Lifetime
(灯管寿命)
≥ 1500Hr
Cooling
(冷却)
Air Cooling
Alignment Accuracy
(对位精度)
≤ ±5㎛ ≤ ±10㎛
DIM
(W x L x H) ㎜
3,200×7,000×2,400 2,500×4,000×2,600
Control
(控制)
PLC & PC
Operation Condition
(运用设备环境条件)
Clean Room (≤1000 Class)
Power Supply
(电源)
3P 220/380V 60/50㎐ 15㎾

单面半自动(对位及间隙) 曝光机

ITEM SPEC.
Exposure Area
(曝光范围)
500×500㎜
Lamp
(灯管)
5㎾ 超高压 Mercury Lamp
(灯管)
Wave Length
(光源波长)
365㎚ (320~480㎚)
绝对糙度
(Intensity)
≥ 35 ㎽/㎠
照度分布
(Uniformity)
超过 90%
C/A & D/A C/A ≤ 1.5°, D/A ≤ 1.5°
Gap Control
(控制)
Gap Control & Soft/Hard Contact
Gap Control Accuracy
≤ ±15㎛ (4-Position Gap Sensor)
Align Camera
(对位用 CCD)
4-Position Camera
Alignment Accuracy
(对位精度)
≤ ±5㎛ (Gap Control)
DIM
(W x L x H) ㎜
2,400×1,500×2,200
Operation Condition
(运用设备环境条件)
Clean Room (≤1000 Class)
Power Supply
(电源)
3P 220/380V 60/50㎐ 8Kw

双面顺次半自动曝光机

ITEM SPEC.
Exposure Area
(曝光范围)
510×610㎜
Lamp
(灯管)
5㎾ 超高压 Mercury Lamp
(灯管)
Wave Length
(光源波长)
365㎚ (320~480㎚)
Resolution
(解析度)
L/S = 30/30㎛
绝对糙度
(Intensity)
≥ 25 ㎽/㎠
照度分布
(Uniformity)
超过 90%
C/A & D/A C/A ≤ 1.5°, D/A ≤ 1.5°
Lamp Lifetime
(灯管寿命)
≥1500Hr
Cooling
(冷却)
Air Cooling
(冷却)
Alignment Accuracy
(对位精度)
≤ ±15㎛
Control
(控制)
PLC & PC
DIM
(W x L x H) ㎜
1,600×3,500×2,400
Operation Condition
(运用设备环境条件)
Clean Room (≤1000 Class)
Power Supply
(电源)
3P 220/380V 60/50㎐ 8Kw

手动平行光曝光机

ITEM SPEC.
Exposure Area
(曝光范围)
510×610㎜
Lamp
(灯管)
5㎾ 超高压 Mercury Lamp
(灯管)
Wave Length
(光源波长)
365㎚ (320~480㎚)
Resolution
(解析度)
L/S = 30/30㎛
绝对糙度
(Intensity)
≥ 25 ㎽/㎠
照度分布
(Uniformity)
超过 90%
Collimation Angle
(散射角)
≤ 1.5°
Declination Angle
(入射角)
≤ 1.5º
Lamp Lifetime
(灯管寿命)
≥1500Hr
Cooling
(冷却)
Air Cooling
Control
(控制)
PLC & PC
DIM
(W x L x H) ㎜
1,450×2,850×2,100
Operation Condition
(运用设备环境条件)
Clean Room (≤1000 Class)
Power Supply
(电源)
3P 220/380V 60/50㎐ 7㎾