DI
Features
Using Multiwavelength LEDs to Form Circuits and Counter Solder Resist
Position matching (overlay) meets ±10 μm (CPK1.33)
Clean room compatibility with semiconductor processes and UL standards
Specification
Wavelength
365㎚, 380㎚, 395㎚, 405㎚
Power Source
Independent LED light sources with 4 wavelengths (individual output adjustable)
Min. Line/Spare/SRD
15㎛ / 15㎛ / 75㎛
Min.Pixel Size
8.88㎛
Work size
510㎚ x 515㎚
Main function
Multi-split exposure support, Auto Focus on board, Automation