Laser Scribing
제품특징
High Precision Dot-to-Dot Processing
Active Path Tracking / Auto Focusing
High-Speed Air Bearing Stage
제품사양
Product size
Max 2300 x 1200
Product corresponding thickness
≤3t
Cycle Time
<20s
Stage Velocity
≤ 5m/s 3G
Scribing Accuracy
≤5㎛
Path Tracking Relative Position
±2.5㎛
Auto Focus
±50㎛
Dot to Dot
±8.0㎛